Humidity Sensing Properties of Different Atomic Layers of Graphene on the SiO2/Si Substrate

• DOI: 10.1021/acsami.4c11194
• Publication Date: 2024-10-02T17:33:16Z
• Authors: Qiang Gao; Hongliang Ma; Chang He; Xiaojing Wang; Jie Ding; Wendong Zhang; Xuge Fan
• Keywords: Condensed Matter - Other Condensed Matter; Condensed Matter - Materials Science; Condensed Matter - Mesoscale and Nanoscale Physics; Mesoscale and Nanoscale Physics (cond-mat.mes-hall); Materials Science (cond-mat.mtrl-sci); FOS: Physical sciences; Physics - Applied Physics; Applied Physics (physics.app-ph); Other Condensed Matter (cond-mat.other)

Graphene has the great potential to be used for humidity sensing due ultrahigh surface area and conductivity. However, impact of different atomic layers graphene on SiO2/Si substrate have not been studied yet. In this paper, we fabricated three types sensors based one graphene, in which areas are 75 {\mu}m * 72 45 {\mu}m, respectively. We both number responsivity response/recovery time prepared graphene-based sensors. found relative resistance change devices decreased with increase under same humidity. Further, tri-layer showed fastest while double-layer slowest time. Finally, chose that relatively good stability application respiration monitoring contact-free finger monitoring.