Scalable Production of Sensor Arrays Based on High-Mobility Hybrid Graphene Field Effect Transistors

• DOI: 10.1021/acsami.6b09238
• Publication Date: 2016-09-27T18:11:47Z
• Authors: Zhaoli Gao; Hojin Kang; Carl H. Naylor; Frank Streller; Pedro Ducos; Madeline D. Serrano; Jinglei Ping; Jonathan Zauberman; Rajesh; Robert W. Carpick; Ying-Jun Wang; Yung Woo Park; Zhengtang Luo; Li Ren; A. T. Charlie Joh...
• Keywords: Bilayer photolithography process; Scalable fabrication; Gold nanoparticles; 02 engineering and technology; Graphene; 0210 nano-technology; DNA biosensor

We have developed a scalable fabrication process for the production of DNA biosensors based on gold nanoparticle-decorated graphene field effect transistors (AuNP-Gr-FETs), where monodisperse AuNPs are created through physical vapor deposition followed by thermal annealing. The FETs in four-probe configuration, using an optimized bilayer photolithography that yields chemically clean devices, as confirmed XPS and AFM, with high carrier mobility (3590 ± 710 cm2/V·s) low unintended doping (Dirac voltages 9.4 2.7 V). AuNP-Gr-FETs were readily functionalized thiolated probe to yield detection limit 1 nM specificity against noncomplementary DNA. Our work provides pathway toward high-performance AuNP-Gr-FET devices label-free nucleic acid testing realistic clinical setting.