On-Chip Optical Gas Sensors Based on Group-IV Materials

• DOI: 10.1021/acsphotonics.0c00976
• Publication Date: 2020-11-07T16:38:15Z
• Authors: Jingwen Wu; Gongcheng Yue; Weicheng Chen; Zhengkun Xing; Jiaqi Wang; Wei Ru Wong; Zhenzhou Cheng; Sze Yun Set; Ganapathy Senthil...; Xingjun Wang; Tiegen Liu
• Keywords: Microelectronics

Compact and smart optical gas sensors have attracted significant attention over the past few decades. Among materials used for developing such sensors, group-IV materials, including silicon, germanium, carbon allotropes, their compounds, are considered most promising candidates. By virtue of inherent compatibility with CMOS fabrication process in mature microelectronics industry, on-chip based on merits appreciable sensitivity high-density integration. Moreover, potential to be integrated other electronic or photonic devices signal processing communication, which expected enable versatile applications internet things, point-of-care testing, information communication technology. This paper is review basic principles, state-of-the-art devices, cutting-edge discussions prospects.