Detection and Discrimination of Volatile Organic Compounds using a Single Film Bulk Acoustic Wave Resonator with Temperature Modulation as a Multiparameter Virtual Sensor Array

• DOI: 10.1021/acssensors.8b01678
• Publication Date: 2019-05-27T18:34:30Z
• Authors: Guang Zeng; Chen Wu; Ye Chang; Cheng Zhou; Bingbin Chen; Menglun Zhang; Jiuyan Li; Xuexin Duan; Qingrui Yang; Wei Pang
• Keywords: Electronic Nose; Modulation (music); Breath gas analysis; Sensor array; Acoustic impedance; Microscale chemistry

This paper describes the detection and discrimination of volatile organic compounds (VOCs) using an e-nose system based on a multiparameter virtual sensor array (VSA), which consists single-chip temperature-compensated film bulk acoustic wave resonator (TC-FBAR) coated with 20-bilayer self-assembled poly(sodium 4-styrenesulfonate)/poly(diallyldimethylammonium chloride) thin films. The high-frequency microscale FBAR VSA was realized by temperature modulation, can greatly reduce cost complexity compared to those traditional allow it operate at different temperatures. effect depends synergy modulation sensing material. For proof-of-concept validation purposes, TC-FBAR exposed six VOC vapors gas partial pressures real-time static dynamic detection. resulting frequency shifts impedance responses were measured temperatures evaluated principal component analysis linear discriminant analysis, revealed that all analytes be distinguished classified more than 97% accuracy. To best our knowledge, this report is first proposed novel shows great potential as compact promising integrated in commercial electronic products.