Large-Area Synthesis of High-Quality Uniform Few-Layer MoTe2

• DOI: 10.1021/jacs.5b07452
• Publication Date: 2015-08-25T18:07:14Z
• Authors: Lin Zhou; Kai Xu; Ahmad Zubair; Albert D. Liao; Wenjing Fang; Fangping Ouyang; Yi-Hsien Lee; Keiji Ueno; Riichiro Saito; Tomás Palacios; Jing Kong; Mildred S. Dresse...
• Keywords: Nanoelectronics; Deposition

The controlled synthesis of large-area, atomically thin molybdenum ditelluride (MoTe2) crystals is crucial for its various applications based on the attractive properties this emerging material. In work, we developed a chemical vapor deposition to produce uniform, and highly crystalline few-layer 2H 1T' MoTe2 films. It was found that these two different phases can be grown depending choice Mo precursor. Because structure, as-grown films display electronic are comparable those mechanically exfoliated flakes. Our growth method paves way large-scale application in high-performance nanoelectronics optoelectronics.