Fast-Response, Sensitivitive and Low-Powered Chemosensors by Fusing Nanostructured Porous Thin Film and IDEs-Microheater Chip

• DOI: 10.1038/srep01669
• Publication Date: 2013-04-17T09:04:04Z
• Authors: Zhengfei Dai; Lei Xu; Guotao Duan; Tie Li; Hongwen Zhang; Yue Li; Yi Wang; Yuelin Wang; Weiping Cai
• Keywords: Microheater

The chemiresistive thin film gas sensors with fast response, high sensitivity, low power consumption and mass-produced potency, have been expected for practical application. It requires both sensitive materials, especially exquisite nanomaterials efficient substrate chip heating electrical addressing. However, it is challenging to achieve repeatable microstructures across the films of chip. Here we presented a new sensor structure via fusion metal-oxide nanoporous micro-electro-mechanical systems (MEMS)-based sensing An interdigital-electrodes (IDEs) microheater integrated MEMS designed employed as in-situ fabricate colloidal monolayer template-induced (egg. SnO2) films. This fused demonstrates mW-level power, ultrafast response (~1 s) parts-per-billion lever detection ethanol gas. Due controllable template strategy mass-production potential, such micro/nano high-performance will be next-generation key miniaturized/integrated devices advanced applications.