Subtractive 3D Printing of Optically Active Diamond Structures

• DOI: 10.1038/srep05022
• Publication Date: 2014-05-21T09:52:53Z
• Authors: Aiden A. Martin; Milos Toth; Igor Aharonovich
• Keywords: Template; Isotropic etching

Controlled fabrication of semiconductor nanostructures is an essential step in engineering high performance photonic and optoelectronic devices. Diamond particular has recently attracted considerable attention as a promising platform for quantum technologies, photonics resolution sensing applications. Here we demonstrate the optically active, functional diamond structures using gas-mediated electron beam induced etching (EBIE). The technique achieves dry chemical at room temperature through dissociation surface-adsorbed H2O molecules by energetic electrons water vapor environment. Parallel processing possible flood exposure use etch mask, while resolution, mask-free, iterative editing demonstrated direct write inclined facets microparticles. realized potential EBIE active diamond.