Controlled Synthesis of Pd/Pt Core Shell Nanoparticles Using Area-selective Atomic Layer Deposition

Octadecyltrichlorosilane Deposition
DOI: 10.1038/srep08470 Publication Date: 2015-02-16T10:23:46Z
ABSTRACT
Abstract We report an atomic scale controllable synthesis of Pd/Pt core shell nanoparticles (NPs) via area-selective layer deposition (ALD) on a modified surface. The method involves utilizing octadecyltrichlorosilane (ODTS) self-assembled monolayers (SAMs) to modify the Take usage pinholes SAMs as active sites for initial nucleation and subsequent selective second metal layer. Since new can be effectively blocked by surface ODTS in stage, we demonstrate successful growth Pt/Pd NPs with uniform structures narrow size distribution. size, thickness composition controlled precisely varying ALD cycles. Such realized using regular recipes without special adjustment. This assisted structure fabrication greatly expands applicability fabricating novel readily applied other compositions.
SUPPLEMENTAL MATERIAL
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