Maskless milling of diamond by a focused oxygen ion beam

• DOI: 10.1038/srep08958
• Publication Date: 2015-03-10T10:10:27Z
• Authors: Aiden A. Martin; Steven Randolph; Aurelien Botman; Milos Toth; Igor Aharonovich
• Keywords: 2. Zero hunger; 0103 physical sciences; 02 engineering and technology; 0210 nano-technology; 01 natural sciences; Article

Abstract Recent advances in focused ion beam technology have enabled high-resolution, maskless nanofabrication using light ions. Studies with ions to date have, however, on milling of materials where sub-surface damage does not inhibit device performance. Here we report single crystal diamond a oxygen Material quality is assessed by Raman and luminescence analysis reveals that the layer generated can be removed non-intrusive post-processing methods such as localised electron induced chemical etching.