Microstructure evolution with varied layer thickness in magnetron-sputtered Ni/C multilayer films

• DOI: 10.1038/srep31522
• Publication Date: 2016-08-12T09:11:57Z
• Authors: Jichang Peng; Wenbin Li; Qiushi Huang; Zhanshan Wang
• Keywords: Nanometre; Cavity magnetron

Abstract The microstructure evolution of magnetron-sputtered Ni/C multilayers was investigated by varying the Ni and C layer thickness in region a few nanometers. For samples having 2.6-nm-thick layers, interface width increases from 0.37 to 0.81 nm as decreases 4.3 1.3 nm. Especially for with layers less than 2.0 nm, changes significantly due discontinuously distributed crystallites. 2.8-nm-thick 0.59 when 0.7 microstructures varied is explained based on proposed simple growth model layers.