A continuous process for Si nanowires with prescribed lengths

02 engineering and technology 0210 nano-technology
DOI: 10.1039/c1jm13831f Publication Date: 2011-09-14T10:28:01Z
ABSTRACT
A simple top–down approach for the continuous mass preparation of single crystalline silicon nanowires (SiNWs) with controlled lengths was developed. The approach is based on periodic pulsing of anodic bias during gold-assisted chemical etching of a silicon substrate and subsequent ultrasonic treatment of the resulting porosity-patterned SiNWs for selective breakage of nanowires at the porous segments, and allows us to overcome some of the drawbacks in conventional bottom–up methods for SiNW growth.
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