Paper-based piezoresistive MEMS sensors

• DOI: 10.1039/c1lc20161a
• Publication Date: 2011-05-12T16:21:53Z
• Authors: Xinyu Liu; Martin Mwangi; XiuJun Li; Michael O'Brien; George M. Whitesides
• Keywords: Piezoresistive effect; Cleanroom

This paper describes the development of MEMS force sensors constructed using as structural material. The working principle on which these paper-based are based is piezoresistive effect generated by conductive materials patterned a substrate. device inexpensive (∼$0.04 per for materials), simple to fabricate, lightweight, and disposable. Paper can be readily folded into three-dimensional structures increase stiffness sensor while keeping it light in weight. entire fabrication process completed within one hour without expensive cleanroom facilities tools (e.g., cutter painting knife). We demonstrated that measure forces with moderate performance (i.e., resolution: 120 μN, measurement range: ±16 mN, sensitivity: 0.84 mV mN−1). applied this characterizing mechanical properties soft Leveraging same sensing concept, we also developed balance range 15 g, resolution 0.39 g.