Login

Atomic layer deposition of a MoS2film

Deposition Layer by layer
DOI: 10.1039/c4nr02451f Publication Date: 2014-07-03T09:12:09Z
Abstract Supplemental Material References Cited by
AUTHORS (6)
Lee Kheng Tan
Bo Liu
Jing Hua Teng
Shifeng Guo
Hong Yee Low
Kian Ping Loh
ABSTRACT
A mono- to multilayer thick MoS<sub>2</sub>film has been grown by using the atomic layer deposition (ALD) technique on a sapphire wafer.
SUPPLEMENTAL MATERIAL
Coming soon ....
REFERENCES (40)
CITATIONS (367)
EXTERNAL LINKS
OPENALEX - Publications  OPENAIRE - Products  CROSSREF - Publications 
PlumX Metrics
RECOMMENDATIONS
FAIR ASSESSMENT
Coming soon ....
JUPYTER LAB
Coming soon ....