Photolithographic fabrication of high-performance all-solid-state graphene-based planar micro-supercapacitors with different interdigital fingers

• DOI: 10.1039/c4ta00958d
• Publication Date: 2014-03-14T12:06:45Z
• Authors: Zhong-Shuai Wu; Khaled Parvez; Xinliang Feng; Klaus Müllen
• Keywords: Power density

Here we demonstrated the fabrication of ultrahigh rate, all-solid-state, planar interdigital graphene-based micro-supercapacitors (MSCs) manufactured by methane plasma-assisted reduction and photolithographic micro-fabrication graphene oxide films on silicon wafers. Notably, electrochemical performance MSCs is significantly enhanced increasing number fingers from 8 to 32 minimizing finger width 1175 219 μm, highlighting critical importance adjusting widths in high-performance MSCs. The fabricated delivered an area capacitance 116 μF cm−2 a stack 25.9 F cm−3. Furthermore, they offered power density 1270 W cm−3 that much higher than electrolytic capacitors, energy ∼3.6 mW h comparable lithium thin-film batteries, superior cycling stability ∼98.5% retention after 50 000 cycles. More importantly, microdevice can operate well at scan rate up 2000 V s−1, which three orders magnitude conventional supercapacitors.