Structural properties and corrosion resistance of tantalum nitride coatings produced by reactive DC magnetron sputtering

• DOI: 10.1039/c6ra17869c
• Publication Date: 2016-09-12T20:02:48Z
• Authors: M. Alishahi; F. Mahboubi; S. M. Mousavi Khoie; M. Aparicio; E. Lopez-Elvira; J. Méndez; R. Gago
• Keywords: 0103 physical sciences; 01 natural sciences

There is a correlation between the corrosion resistance, structure, roughness and the porosity of TaN sputtered films.