Ferroelectric polymer nanopillar arrays on flexible substrates by reverse nanoimprint lithography

• DOI: 10.1039/c6tc01848c
• Publication Date: 2016-05-26T15:37:01Z
• Authors: Jingfeng Song; Haidong Lu; Keith Foreman; Shumin Li; Li Tan; Shireen Adenwalla; Alexei Gruverman; Stephen Ducharme
• Keywords: Nanopillar; Nanoimprint lithography; Soft Lithography

Large area ferroelectric polymer nanopillar arrays were prepared directly on flexible substrates using soft-mold reverse nanoimprint lithography at low pressure.