Composition and properties of RF-sputter deposited titanium dioxide thin films

• DOI: 10.1039/d0na00861c
• Publication Date: 2020-12-09T04:18:08Z
• Authors: Jesse Daughtry; Abdulrahman S. Al...; Liam Howard-Fabretto; Gunther G. Andersson
• Keywords: Titanium Dioxide

The photocatalytic properties of titania (TiO2) have prompted research utilising its useful ability to convert solar energy into electron-hole pairs drive novel chemistry. aim the present work is examine required for a synthetic method capable producing thin TiO2 films, with well defined, easily modifiable characteristics. Presented here synthesis nanoparticulate films generated using RF plasma homogenous depositions known elemental composition and at far lower cost than single-crystal TiO2. Multiple regimes were examined their effect on overall chemical minimise unwanted contaminant, carbon, from final film. resulting can be modified through heating further induce defects change electronic structure, crystallinity, surface morphology roughness deposited