Wafer-scale MoS2 with water-vapor assisted showerhead MOCVD

• DOI: 10.1039/d2na00409g
• Publication Date: 2022-09-02T06:02:15Z
• Authors: Michal Macha; Hyun Goo Ji; Mukesh Tripathi; Yanfei Zhao; Mukeshchand Thakur; Jing Zhang; Andras Kis; Aleksandra Radenovic
• Keywords: Chemistry; heterostructures; growth; graphene; monolayer mos2; layers; films; deposition

We adapted the most efficient monolayer growth methodologies from tube-furnace systems to the showerhead geometries. A combination of gas-phase precursors, pre-seeding substrate coating and H2O vapor added during growth yields 4-inch monolayer MoS2.