Backside illuminated high saturation current partially depleted absorber photodetecters

• DOI: 10.1049/el:20030927
• Publication Date: 2003-10-02T08:02:29Z
• Authors: X. Li; S. Demiguel; N. Li; J.C. Campbell; D.L. Tulchinsky; K.J. Williams
• Keywords: 0211 other engineering and technologies; 02 engineering and technology; 7. Clean energy

A high-saturation-current, backside-illuminated In0.53Ga0.47As photodiode with a partially depleted absorber has been fabricated and tested. The 1 dB small-signal compression current was 199 mA at 1 GHz for a 100 µm diameter photodiode. The 1 dB large-signal compression current was 24 mA at 48 GHz for an 8 µm-diameter photodiode. The responsivity was 0.6 A/ W at 1.55 µm.