Low cost PC based scanning Kelvin probe

• DOI: 10.1063/1.1149197
• Publication Date: 2002-07-26T12:03:30Z
• Authors: I. D. Baikie; P. J. Estrup
• Keywords: Spurious relationship; Sample (material); SIGNAL (programming language); Interface (matter)

We have developed a novel, low cost, scanning Kelvin probe (SKP) system that can measure work function (wf) and surface potential (sp) topographies to within 1 meV energy resolution. The control measurement subcomponents are PC based incorporate flexible user interface, permitting software of major parameters allowing easy implementation via automatic setup procedures. review the mode operation design features SKP including digital oscillator, compact ambient voice-coil head-stage, signal processing techniques. This offers unique tip-to-sample spacing (to 40 nm) which provides method simultaneously imaging sample height is essential avoid spurious or “apparent” wf changes due scanning-induced changes. illustrate in generating high resolution wf/sp profiles metal interfaces (as tip characterization procedure) operational electronic devices. potentially has very wide range applications ranging from semiconductor quality thin film analyses corrosion biopotential imaging.