Macroporous silicon with a complete two-dimensional photonic band gap centered at 5 μm

• DOI: 10.1063/1.116729
• Publication Date: 2002-07-26T13:40:49Z
• Authors: U. Grüning; V. Lehmann; S. Ottow; K. Busch
• Keywords: Porous Silicon; Hydrofluoric acid; Rod; Lattice constant; Hexagonal Lattice; Lattice (music)

We have fabricated a two-dimensional photonic band structure based on macroporous silicon with gap common to both polarizations and centered at 5 μm. A triangular lattice of circular air rods constant 2.3 μm was etched 75 deep in an n-type substrate by electrochemical pore formation hydrofluoric acid. The porous layer then micromechanically structured such way that 200 thick free-standing bars material were left over the substrate. These used for measuring transmission lattice. results showed excellent agreement theoretically calculated structure.