Macroporous silicon with a complete two-dimensional photonic band gap centered at 5 μm

Porous Silicon Hydrofluoric acid Rod Lattice constant Hexagonal Lattice Lattice (music)
DOI: 10.1063/1.116729 Publication Date: 2002-07-26T13:40:49Z
ABSTRACT
We have fabricated a two-dimensional photonic band structure based on macroporous silicon with gap common to both polarizations and centered at 5 μm. A triangular lattice of circular air rods constant 2.3 μm was etched 75 deep in an n-type substrate by electrochemical pore formation hydrofluoric acid. The porous layer then micromechanically structured such way that 200 thick free-standing bars material were left over the substrate. These used for measuring transmission lattice. results showed excellent agreement theoretically calculated structure.
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