Piezoelectric measurements with atomic force microscopy

• DOI: 10.1063/1.122914
• Publication Date: 2002-07-26T12:42:02Z
• Authors: J. A. Christman; R. R. Woolcott; A. I. Kingon; R. J. Nemanich
• Keywords: 02 engineering and technology; 0210 nano-technology

An atomic force microscope (AFM) is used to measure the magnitude of effective longitudinal piezoelectric constant (d33) thin films. Measurements are performed with a conducting diamond AFM tip in contact top electrode. The interaction between and electric field present potentially large source error that eliminated through use this configuration tips. yielded reasonable constants X-cut single-crystal quartz, film ZnO, nonpiezoelectric SiO2