Hydrogen stability in diamond-like carbon films during wear tests

• DOI: 10.1063/1.125361
• Publication Date: 2002-07-26T12:01:09Z
• Authors: B. Racine; M. Benlahsen; K. Zellama; M. Zarrabian; J. P. Villain; G. Turban; A. Grosman
• Keywords: Elastic recoil detection; Carbon fibers; Diamond-like carbon; Electron cyclotron resonance; Glow discharge

Hydrogen stability has been investigated during wear tests in particular diamond-like carbon films deposited a dual electron cyclotron resonance radio frequency glow discharge plasma system, at two different substrate bias voltages equal to −30 and −600 V, for series I II, respectively. Combined infrared absorption elastic recoil detection analysis experiments are used fully characterize the their as-deposited state after tests. The results indicate clearly that total bonded hydrogen content as well concentration decrease series. Two mechanisms discussed explain these results, e.g., surface contact graphitization due heating effect diffusion free result of plastic deformation process.