Indium tin oxide thin films grown on flexible plastic substrates by pulsed-laser deposition for organic light-emitting diodes

• DOI: 10.1063/1.1383568
• Publication Date: 2002-07-26T13:26:45Z
• Authors: H. Kim; J. S. Horwitz; G. P. Kushto; Z. H. Kafafi; D. B. Chrisey
• Keywords: Indium tin oxide; Pulsed Laser Deposition

Transparent conducting indium tin oxide (ITO) thin films were grown by pulsed laser deposition (PLD) on flexible polyethylene terephthalate (PET) substrates. The structural, electrical, and optical properties of these investigated as a function substrate temperature background gas pressure. ITO (200 nm thick), deposited PLD PET at 25 °C 45 mTorr oxygen, exhibit high transparency (∼87%) in the visible (400–700 nm) with low electrical resistivity 7×10−4 Ω cm. used anode contact organic light-emitting devices. A luminous power efficiency ∼1.6 lm/W was achieved 100 cd/m2, slightly higher than that (∼1.5 lm/W) measured for control device based sputter-deposited glass.