Noise processes in nanomechanical resonators

• DOI: 10.1063/1.1499745
• Publication Date: 2002-09-30T16:41:03Z
• Authors: A. N. Cleland; M. L. Roukes
• Keywords: Johnson–Nyquist noise

Nanomechanical resonators can be fabricated to achieve high natural resonance frequencies, approaching 1 GHz, with quality factors in excess of 104. These are candidates for use as highly selective rf filters and precision on-chip clocks. Some fundamental some nonfundamental noise processes will present limits the performance such resonators. include thermomechanical noise, Nyquist–Johnson adsorption–desorption noise; other important sources those due thermal fluctuations defect motion-induced noise. In this article, we develop a self-contained formalism treating these sources, it estimate impact that have on model nanoscale resonator, consisting doubly clamped beam single-crystal Si frequency GHz.