Fabrication of a vector Hall sensor for magnetic microscopy

• DOI: 10.1063/1.1577820
• Publication Date: 2003-05-22T22:01:44Z
• Authors: D. Gregušová; V. Cambel; J. Fedor; R. Kúdela; J. Šoltýs; T. Lalinský; I. Kostič; S. J. Bending
• Keywords: 02 engineering and technology; 0210 nano-technology

We have developed a micromachined Hall sensor for scanning the entire magnetic field vector whose active dimensions are an order of magnitude smaller (∼5 μm) than the smallest existing vector field sensor. It is realized by patterning three Hall probes on the tilted faces of epitaxy-overgrown GaAs-based pyramidal-shaped mesa structures. Data from these “tilted” Hall probes are used to reconstruct the full magnetic field vector.