Tuning photonic crystal nanocavity modes by wet chemical digital etching

• DOI: 10.1063/1.1992656
• Publication Date: 2005-07-08T00:33:04Z
• Authors: K. Hennessy; A. Badolato; A. Tamboli; P. M. Petroff; E. Hu; M. Atatüre; J. Dreiser; A. Imamoğlu
• Keywords: Isotropic etching; Biexciton

We have developed a wet chemical digital etching technique for tuning the resonant wavelengths of photonic crystal (PC) nanocavities over wide range 80nm in precise 2–3nm steps while preserving high cavity quality factors. In one step, few monolayers material are removed from surface by self-formed native oxide 1mol citric acid. Due to self-limiting thickness, total is based only on number etch steps, resulting highly controlled, ability. characterized behavior GaAs PC defect cavities both square and triangular lattice symmetry proven effectiveness this method mode into resonance with charged exciton, then later biexciton, transition single InAs∕GaAs self-assembled quantum dot.