Flexible piezoelectric pressure sensors using oriented aluminum nitride thin films prepared on polyethylene terephthalate films

• DOI: 10.1063/1.2401312
• Publication Date: 2006-12-13T15:42:34Z
• Authors: Morito Akiyama; Yukari Morofuji; Toshihiro Kamohara; Keiko Nishikubo; Masayoshi Tsubai; Osamu Fukuda; Naohiro Ueno
• Keywords: 02 engineering and technology; 0210 nano-technology

We have investigated the high sensitive piezoelectric response of c-axis oriented aluminum nitride (AlN) thin films prepared on polyethylene terephthalate (PET) films. The AlN were deposited using a radio frequency magnetron sputtering method at temperatures close to room temperature. c axes perpendicularly PET film surfaces. sensor consisting and is flexible like electrical charge linearly proportional stress within wide range from 0to8.5MPa. can respond frequencies 0.3 over 100Hz measures clear human pulse wave form by holding between thumb middle finger. resolution comparable sphygmomanometer levels 10kPa. think that origin performance deflection effect, thickness elastic modulus layer, low film.