Wax-bonded NdFeB micromagnets for microelectromechanical systems applications
Neodymium magnet
DOI:
10.1063/1.2830532
Publication Date:
2008-01-22T23:39:06Z
AUTHORS (3)
ABSTRACT
A microfabrication technique is reported for the fabrication of wax-bonded micromagnets in 100μm–1mm range. This dimensional size not typically achievable by thin-film deposition techniques or conventional macroscale magnet processing, and interest magnetic microelectromechanical systems applications. The approach incorporates a wax powder binder to “lock” microparticles together improve coercivity. In practice, NbFeB are packed into pre-etched trenches silicon wafer subsequently heated, allowing melt bond powder. Using this method, 500×500×320μm3 magnets have been demonstrated with coercivity 737kA∕m maximum energy product 16.6kJ∕m3.
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