Epitaxial nanotwinned Cu films with high strength and high conductivity

• DOI: 10.1063/1.2969409
• Publication Date: 2008-08-26T22:59:25Z
• Authors: O. Anderoglu; A. Misra; H. Wang; F. Ronning; M. F. Hundley; X. Zhang
• Keywords: Nanocrystalline material; Cavity magnetron

We report on the synthesis of epitaxial (single-crystal-like), nanotwinned Cu films via magnetron sputtering. Increasing deposition rate from 1 to 4 nm/s decreased average twin lamellae spacing 16 7 nm. These exhibit significantly higher ratio hardness room temperature electrical resistivity than columnar grain (nanocrystalline), textured, films.