Micromechanical magnetometer using an all-silicon nonlinear torsional resonator

• DOI: 10.1063/1.3242003
• Publication Date: 2009-10-03T13:02:23Z
• Authors: D. Antonio; M. I. Dolz; H. Pastoriza
• Keywords: Q factor; Torsional Vibration

In this work, a micromagnetometer employing nonlinear torsional resonator with high quality factor Q is presented experimentally. Oscillatory rotation of conducting plate in the sensed magnetic field H induces eddy currents that dissipate energy. Due to response oscillator, resulting mechanical damping originates frequency shifts resonance curve depend on H. Nonlinearity results from electrostatic detection, which introduces order electrical spring constants. The device fabricated standard silicon process and does not incorporate ferromagnetic materials. An analytical model correctly describes also introduced.