Characterization of thin metal films via frequency-domain thermoreflectance

• DOI: 10.1063/1.3289907
• Publication Date: 2010-01-27T23:17:01Z
• Authors: Aaron J. Schmidt; Ramez Cheaito; Matteo Chiesa
• Keywords: Thermal conductivity measurement; Characterization

Frequency-domain thermoreflectance is extended to the characterization of thin metals films on low thermal diffusivity substrates. We show how a single noncontact measurement can yield both thickness and conductivity metal film with high accuracy. Results are presented from measurements gold aluminum 20–100 nm thick fused silica substrate. The verified independently atomic force microscope cross sections, through electrical via Wiedemann–Franz law. values in good agreement results for all at least 30 thick, indicating that our method be used estimate along sufficiently films.