High resistive nanocrystalline Fe-M-O (M=Hf, Zr, rare-earth metals) soft magnetic films for high-frequency applications (invited)

• DOI: 10.1063/1.365498
• Publication Date: 2002-07-26T12:29:50Z
• Authors: Y. Hayakawa; A. Makino; H. Fujimori; A. Inoue
• Keywords: Nanocrystalline material; Resistive touchscreen

Microstructure, soft magnetic properties, and applications of high resistive Fe-M-O (M=Hf, Zr, rare-earth metals) were studied. The films are composed bcc nanograins amorphous phases with larger amounts M O elements which chemically combine each other. Consequently, the have electrical resistivity. compositional dependence resistivity, structure been almost clarified. For example, magnetization 1.3 T, permeability 1400 at 100 MHz resistivity 4.1 μΩ m simultaneously obtained for as-deposited Fe62Hf11O27 nanostructured film fabricated by rf reactive sputtering in a static field. Furthermore, Co addition to improves frequency characteristics mainly increase crystalline anisotropy nanograins. Co44.3Fe19.1Hf14.5O22.1 exhibits quality factor (Q=μ′/μ′′) 61 μ′ 170 as well Is 1.1 T. This is considered be superior other already reported. also exhibit corrosion resistance an isotonic sodium chloride solution. Therefore, these enable us realize high-frequency devices, such thin-film inductors transformers microswitching converters ultrahigh-density recording heads.