Planar superconducting resonators with internal quality factors above one million

• DOI: 10.1063/1.3693409
• Publication Date: 2012-03-15T15:13:30Z
• Authors: A. Megrant; C. Neill; R. Barends; B. Chiaro; Yu Chen; L. Feigl; J. Kelly; Erik Lucero; Matteo Mariantoni; P. J. J. O’Malley; D. Sank; A. Vainsencher; J. Wenner; T. C. White; Y. Yin; J. Zhao; C. J. Palmstrøm; John M. Martinis; A. N. Cleland
• Keywords: Coplanar waveguide; Q factor; Waveguide

We describe the fabrication and measurement of microwave coplanar waveguide resonators with internal quality factors above 10 million at high powers over 1 low powers, best power results approaching 2 million, corresponding to ~1 photon in resonator. These are achieved by controllably producing very smooth clean interfaces between resonators' aluminum metallization underlying single crystal sapphire substrate. Additionally, we a method for analyzing resonator response, which can directly determine factor frequency embedded an imperfect circuit.