Scalable stacked array piezoelectric deformable mirror for astronomy and laser processing applications

• DOI: 10.1063/1.4865125
• Publication Date: 2014-02-13T01:30:42Z
• Authors: Krystian L. Wloda...; Emma Bryce; Noah Schwartz; Mel Strachan; David Hutson; Robert R. J. Maier; David Atkinson; Steven Beard; Tom Baillie; Phil Parr-Burman; Katherine Kirk; Duncan P. Hand
• Keywords: Deformable Mirror

A prototype of a scalable and potentially low-cost stacked array piezoelectric deformable mirror (SA-PDM) with 35 active elements is presented in this paper. This characterized by 2 μm maximum actuator stroke, 1.4 sag (measured for 14 mm × area the unpowered SA-PDM), ±200 nm hysteresis error. The initial proof concept experiments described here show that can be successfully used shaping high power laser beam order to improve machining performance. Various shapes have been obtained SA-PDM examples shaped beams are presented.