Effects of magnetic field and pressure in magnetoelastic stress reconfigurable thin film resonators

• DOI: 10.1063/1.4927309
• Publication Date: 2015-07-22T17:00:36Z
• Authors: M. Staruch; C. Kassner; S. Fackler; I. Takeuchi; K. Bussmann; S. E. Lofland; C. Dolabdjian; R. Lacomb; P. Finkel
• Keywords: Hysteresis; Torr

Free-standing CoFe thin-film doubly clamped stress reconfigurable resonators were investigated as a function of magnetic field and pressure. A large uniaxial anisotropy resulting from residual tensile stress, revealed hysteresis loops, leads to an easy magnetization axis aligned along the length beams. The quality factor driven resonator beams under vacuum is increased by 30 times, leading enhanced signal-to-noise ratio predicted reduction in intrinsic noise 6, potentially reaching low ∼25 pT/√Hz at 1 Torr. Stress sensors operating could thus further improve limit detection advance development sensing technology.