Vacuum arc plasma generation and thin film deposition from a TiB2cathode

• DOI: 10.1063/1.4935152
• Publication Date: 2015-11-04T18:01:11Z
• Authors: Igor Zhirkov; Andrejs Petruhins; Lars-Ake Naslund; Szilard Kolozsvári; Peter Polcik; Johanna Rosen
• Keywords: Icon; Search engine optimization

Views Icon Article contents Figures & tables Video Audio Supplementary Data Peer Review Share Twitter Facebook Reddit LinkedIn Tools Reprints and Permissions Cite Search Site Citation Igor Zhirkov, Andrejs Petruhins, Lars-Ake Naslund, Szilard Kolozsvári, Peter Polcik, Johanna Rosen; Vacuum arc plasma generation thin film deposition from a TiB2 cathode. Appl. Phys. Lett. 2 November 2015; 107 (18): 184103. https://doi.org/10.1063/1.4935152 Download citation file: Ris (Zotero) Reference Manager EasyBib Bookends Mendeley Papers EndNote RefWorks BibTex toolbar search Dropdown Menu input auto suggest filter your All ContentAIP Publishing PortfolioApplied Physics Letters Advanced |Citation