On-chip pressure sensor using single-layer concentric chambers

• DOI: 10.1063/1.4945412
• Publication Date: 2016-03-31T17:27:05Z
• Authors: Chia-Hung Dylan Tsai; Makoto Kaneko
• Keywords: Polydimethylsiloxane; Intensity

A vision-based on-chip sensor for sensing local pressure inside a microfluidic device is proposed and evaluated in this paper. The determined from the change of color intensity chamber which pre-filled with colored fluid. working principle based on polydimethylsiloxane deformation. at point interest guided into deformation chamber, where structural stiffness softened by geometry, thus, deforms as result changes. Such transmitted to same-layer concentric chamber. causes fluid flowing or out leads different top view through microscope. Experimental evaluations static dynamic responses regulated input pressures were conducted. correlation response 0.97 while are successfully observed up 16 Hz. greatest advantage that can be directly seen without any additional hardware electricity. whole single-layer design, so fabrication simple, consistent, low-cost. design also provides convenience easy integration existing systems.