Ablation and transmission of thin solid targets irradiated by intense extreme ultraviolet laser radiation

• DOI: 10.1063/1.4953669
• Publication Date: 2016-07-12T19:05:41Z
• Authors: V. Aslanyan; I. Kuznetsov; H. Bravo; M. R. Woolston; A. K. Rossall; C. S. Menoni; J. J. Rocca; G. J. Tallents
• Keywords: Extreme Ultraviolet Lithography; Extreme ultraviolet; Nanosecond; Laser Ablation; Pulse duration; Micrometer; Ultraviolet

The interaction of an extreme ultraviolet (EUV) laser beam with a parylene foil was studied by experiments and simulation. A single EUV pulse nanosecond duration focused to intensity 3 × 1010 W cm−2 perforated micrometer thick targets. same simultaneously used diagnose the transmission measurement. combination 2-dimensional radiation-hydrodynamic diffraction calculations model ablation, leading good agreement experiment. This theoretical approach allows predictive modelling matter intense beams over broad range parameters.