Fabrication of a protruding Si-based nozzle structure by MEMS processes for electrohydrodynamic jet printing

• DOI: 10.1063/1.5090672
• Publication Date: 2019-02-14T01:30:43Z
• Authors: Yanqiao Pan; Xinyuan Chen
• Keywords: Electrohydrodynamics; Microscale chemistry

Printhead with microscale nozzle is very important for electrohydrodynamic jet (E-jet) printing, that decides output performance of system. It challenge and necessary to design fabricate a protruding Si-based strucure E-jet prining. In this paper, structure designed the corresponding fabricating flow chart introduced based on photolithography, wet etching, magnetron sputtering, inductively coupled plasma. Then, effect etching ratio between big area small section analyzed discussed in details. The failure first time fabrication shows it indipensable not only achieve process parameters, but also set reasonable manufacturing Si-baesd sucessfully. Finally, structue successfully fabricated printing.