A beam profile monitor for picoampere low-energy ion beams

• DOI: 10.1063/1.5094090
• Publication Date: 2019-07-11T14:06:50Z
• Authors: Xiaoxiao Li; Junliang Liu; Deyang Yu; Xin Li; Liping Yang; Xiaoxun Song; Xinfei Hui; Jun Li; Tongmin Zhang; Huiping Liu; Long Kang; Jinyu Li; Xing Fang; Xiaolong Zhu
• Keywords: Ion gun; Ion current; Charged particle beam

A beam-profile monitor has been constructed based on a two-dimensional cross-connected-pixels anode and 128-channel picoammeter system. It can provide the total beam current, as well current projections in x- y-directions with spatial resolution of ∼1 mm. is suitable for diagnosis low-energy charged-particle beams ranging from subpicoamperes to nanoamperes, e.g., ion extracted an electron source.