Three-dimensional reconstruction of the emission field of the inductively coupled plasma jet

• DOI: 10.1063/5.0147405
• Publication Date: 2023-08-14T09:55:19Z
• Authors: Fei Ding; Yanming Liu; Jing Jia; Xiaoping Li; Jiaxin Li; Yingxin Zhao; Rui Li
• Keywords: 0103 physical sciences; 01 natural sciences

Three-dimensional plasma diagnosis is crucial for understanding the distribution of physical parameters inhomogeneous plasma. Optical emission spectroscopy (OES) can obtain electron temperature and density by spectrum lines. The premise 3D OES to field at different wavelengths. In this paper, we studied how reconstruct inductively coupled (ICP) jet. purpose work provide an imaging basis future Volume tomography directly two-dimensional images from multiple perspectives, so it used ICP During reconstruction, Monte Carlo method calculate weight coefficient. order solve ill-posed linear equations involving a large-size matrix fast, first compared performance three inversion algorithms in terms aspects then proposed multiscale calculation reduce size matrix. We eventually established reconstruction system jets powers with 5 mm spatial resolution, based upon which demonstrated non-uniform structure re-projection error jet reconstructed verifies high accuracy method.