An adaptive diagnosis system for copper wire bonding process control and quality assessment in integrated circuit assembly

• DOI: 10.1080/0951192x.2012.731614
• Publication Date: 2012-11-08T11:15:13Z
• Authors: Tsung-Nan Tsai
• Keywords: 0209 industrial biotechnology; 02 engineering and technology

Copper (Cu) wire has become an alternative material for wire bonding in many microelectronic applications due to the high appreciation in the price of gold. However, the Cu wire bonding process is relatively new to integrated circuit (IC) assembly and must be appropriately controlled to save on manufacturing costs without encountering reliability problems or losing quality. This study proposes an adaptive diagnosis system for the control and quality assessment of the Cu wire bonding process using grey relational analysis (GRA) and a neurofuzzy technique. A fractional factorial experimental design is first utilised to collect structured data, and the results are analysed through an integrated GRA and entropy measurement method to convert the multiple quality characteristics of Cu wire bonding into a synthetic performance index. Next, the neurofuzzy data-learning technique is used to establish the essential knowledge bases. The in-process-quality-control (IPQC) data are then clustered and utilised to fine-t...