Quantitative analysis of angle-selective backscattering electron image of iron oxide and steel

• DOI: 10.1093/jmicro/dfv026
• Publication Date: 2015-06-06T00:30:18Z
• Authors: Tomohiro Aoyama; Masayasu Nagoshi; Kaoru Sato
• Keywords: 02 engineering and technology; 0210 nano-technology

The contrasts in backscattered electron (BSE) images, such as topographic, channeling and mean atomic number (Z) contrasts, were investigated quantitatively from the cross section of a heat-treated steel sheet using scanning microscope (SEM). High primary energy (EP) enhances Z contrast, whereas low EP improves contrast. A high take-off angle (θ; measured specimen surface) also θ When becomes very low, topographic information is enhanced superimposed on contrast due to tilt effect BSE. relationship behaviors can be understood by detection ratio low-loss electrons (LLEs) inelastic BSE components emitted sample surface; LLEs contribute their increases with decreasing θ. systematic results obtained this study are useful for controlling SEM conditions order enhance target images practical materials interest.