Gigahertz Phononic Integrated Circuits Based on Overlay Slot Waveguides

• DOI: 10.1103/physrevapplied.19.064076
• Publication Date: 2023-06-27T15:56:00Z
• Authors: Ziyao Feng; Yang Liu; Xiang Xi; Lai Wang; Xiankai Sun
• Keywords: Cladding (metalworking); Waveguide

Harnessing the properties of phonons on a chip, phononic integrated circuits are playing an increasingly important role in optoelectronic integration. To date, most such waveguides realized by etching piezoelectric layer and forming wire, which not only involves complicated fabrication processes but also limits integration with electronic photonic elements same chip. overcome these difficulties, here we propose demonstrate type overlay slot waveguide obtained patterning thin silicon cladding unetched gallium-nitride-on-sapphire substrate. We experimentally guiding power splitting gigahertz surface acoustic waves waveguides, measured propagation loss about 1.80 dB/mm for Rayleigh mode. theoretically predict that Love mode can turn into bound state continuum under special conditions. Such introduce alternative paradigm circuitry will enable applications information processing, environmental monitoring, noninvasive manipulation biomolecules