PZT micro-transfer printing for photonic MEMS

• DOI: 10.1109/ipc57732.2023.10360713
• Publication Date: 2023-12-25T19:37:55Z
• Authors: I. Ansari; K. De Geest; J. De Witte; T. Vandekerckhove; H. Rijckaert; E. Picavet; E. Lievens; G. F. Feutmba; T. Van de Veire; B. Kuyken; J. Beeckman; D. Van Thourhout
• Keywords: Lead zirconate titanate; Realization (probability); Transfer printing

This paper demonstrates micro-transfer printing of a photonics-compatible lead zirconate titanate (PZT) film. The PZT coupons were released by etching the underlying SiO <inf xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">2</inf> layer with HF vapor and successfully transferred onto Si substrate. technique enables realization piezo-MEMS for photonics applications.