Optical Fiber Gas Pressure Sensor Based on Polydimethylsiloxane Microcavity

• DOI: 10.1109/jlt.2021.3054883
• Publication Date: 2021-01-28T21:16:22Z
• Authors: Xiangyu Wei; Xiaokang Song; Chang Li; Liangtao Hou; Zhaojun Li; Yan Li; Lingling Ran
• Keywords: Polydimethylsiloxane; Pressure measurement; Linearity

We experimentally demonstrated a high sensitive gas pressure sensor, which also has more concise processing steps and lower cost. The sensor was fabricated by splicing the single-mode fiber (SMF) short section of hollow-core (HCF) filled with Polydimethylsiloxane (PDMS) film to form an enclosed air microcavity length 55 μm. thin PDMS plays role in reflecting beam. thermo-optical effect thickness can affect cavity that is external pressure. When membrane 3 μm, measured sensitivity reaches 52.143 nm/Mpa, linearity 99.86%, cross-sensitivity over temperature than 2.51 × 10 <sup xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">−3</sup> Mpa/°C. Moreover, compact structure, sensitivity, mechanical strength, convenient fabrication make it suitable for measuring harsh conditions.