Micromechanical testing of SU‐8 cantilevers

• DOI: 10.1111/j.1460-2695.2005.00873.x
• Publication Date: 2005-07-01T17:52:59Z
• Authors: M. HOPCROFT; T. KRAMER; G. KIM; K. TAKASHIMA; Y. HIGO; D. MOORE; J. BRUGGER
• Keywords: Microscale chemistry; Microtechnology; Nanomechanics; Micromechanics

ABSTRACT SU‐8 is a photoplastic polymer with wide range of possible applications in microtechnology. Cantilevers designed for atomic force microscopes were fabricated SU‐8. The mechanical properties these cantilevers investigated using two microscale testing techniques: contact surface profilometer beam deflection and static load at point on the specially test machine. Young's modulus value from methods approximately 2–3 GPa.