Influence of LNO Top Electrodes on Electrical Properties of KNN/LNO Thin Films Prepared by RF Magnetron Sputtering

• DOI: 10.1111/jace.12047
• Publication Date: 2012-10-26T12:56:42Z
• Authors: Tao Li; Genshui Wang; Kui Li; Nossikpendou Sama; Denis Remiens; Xianlin Dong
• Keywords: Lanio

Highly (001) oriented ( K , Na ) NbO 3 KNN lead‐free piezoelectric thin films were grown on LaNiO LNO )‐coated silicon by RF magnetron sputtering. The effects of the top electrodes electrical properties investigated. dielectric and remarkably improved in / (ε r = 899 at 1 kHz, d 33 58 pm/V), compared with that Pt 584 26 pm/V). An enhanced ferroelectricity was also obtained a remnant polarization 12 μC/cm 2 maximum 23 applied field 200 kV/cm. Besides, temperature dependence piezoelectricity characterized this study.