Reactions of metal chlorides with hexamethyldisilazane: Novel precursors to aluminum nitride and beyond

• DOI: 10.1111/jace.18271
• Publication Date: 2021-12-04T07:18:30Z
• Authors: Xinyu Zhang; Mengjie Yu; Sylvio Indris; Richard M. Laine
• Keywords: Thermogravimetric analysis; Magic angle spinning

Abstract Metal nitrides are intensely investigated because they can offer high melting points, excellent corrosion resistance, hardness, electronic and magnetic properties superior to the corresponding metals/metal oxides. Thus, used in diverse applications including refractory materials, semiconductors, devices, energy storage/conversion systems. Here, we present a simple, novel, scalable general route metal nitride precursors by reactions of chlorides with hexamethyldisilazane [HMDS, (Me 3 Si) 2 NH] tetrahydrofuran or acetonitrile at low temperatures (ambient 60°C/N ). Such have received scant attention literature. The work reported here focuses primarily on Al‐HMDS precursor produced from reaction AlCl HMDS (mole ratio = 1:3) characterized matrix‐assisted laser desorption/ionization‐time flight, Fourier‐transform infrared spectroscopy, thermogravimetric analysis‐differential thermal analysis, multinuclear nuclear resonance spectroscopy (NMRs) for chemical structural analyses. heated 1600°C/4 h/N produces aluminum nitride, X‐ray powder diffraction, photoelectron scanning electron microscopy/energy‐dispersive magic‐angle spinning NMR. On heating 800–1200°C/4 , transforms an amorphous, oxygen‐sensitive very surface areas (>200 m /g) indicating nanosized particles, which be as additives polymer matrices modify their stabilities. Al O is also presented final product after heating, due its susceptibility oxidation. This approach was extended via proof‐of‐concept studies other chloride systems, Zn‐HMDS, Cu‐HMDS, Fe‐HMDS, Bi‐HMDS. formed volatile, offering potential utility gas‐phase deposition nitrides.